Ge deep sub-micron HiK/MG pFET with superior drive compared to Si HiK/MG state-of-the-art reference

De Jaeger, BriceBriceDe JaegerKaczer, BenBenKaczerZimmerman, PaulPaulZimmermanOpsomer, KarlKarlOpsomerWinderickx, GillisGillisWinderickxVan Steenbergen, JanJanVan SteenbergenVan Moorhem, ElsElsVan MoorhemTerzieva, ValentinaValentinaTerzievaBonzom, RenaudRenaudBonzomLeys, FrederikFrederikLeysArena, ChantalChantalArenaBauer, MatthiasMatthiasBauerWerkhoven, ChrisChrisWerkhovenCaymax, MattyMattyCaymaxMeuris, MarcMarcMeurisHeyns, MarcMarcHeyns2021-10-162021-10-162007-01https://imec-publications.be/handle/20.500.12860/11953Ge deep sub-micron HiK/MG pFET with superior drive compared to Si HiK/MG state-of-the-art referenceJournal article