Characterisation of capacitive field-effect sensors with a nanocrystalline-diamond film as transducer material for multi-parameter sensing

Abouzar, M.H.M.H.AbouzarPoghossian, A.A.PoghossianRazavi, A.A.RazaviWilliams, OliverOliverWilliamsBijnens, N.N.BijnensWagner, P.P.WagnerSchöning, M.J.M.J.Schöning2021-10-172021-10-1720090956-5663https://imec-publications.be/handle/20.500.12860/14861Characterisation of capacitive field-effect sensors with a nanocrystalline-diamond film as transducer material for multi-parameter sensingJournal article