Carrier illumination for monitoring of CMOS ultra-shallow junctions

Clarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstLindsay, RichardRichardLindsayBorden, P.P.BordenBudiarto, E.E.Budiarto2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6123Carrier illumination for monitoring of CMOS ultra-shallow junctionsOral presentation