Wellekens, DirkDirkWellekensDe Vos, JoeriJoeriDe VosVan Houdt, JanJanVan Houdtvan der Zanden, KoenKoenvan der Zanden2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14783Optimization of Al2O3 interpoly dielectric for embedded flash memory applicationsProceedings paper