Min, Woo SigWoo SigMinLantasov, YuriYuriLantasovPalmans, RogerRogerPalmansMaex, KarenKarenMaexLee, D. N.D. N.Lee2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2771The formation of Pd seeded copper layer on TiN substrates by electroless depositionOral presentation