Lernout, JoJoLernoutVanfleteren, JanJanVanfleterenVan Calster, AndreAndreVan CalsterSchols, G.G.Schols2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1988A five layer thin film MCM-Si design using oxynitride dielectricsProceedings paper