Defect free trench isolation for high voltage bipolar application on SOI wafer

Yindeepol, W.W.YindeepolBashir, R.R.BashirMcGregor, J. M.J. M.McGregorBrown, K. C.K. C.BrownDe Wolf, IngridIngridDe WolfDe Santis, J.J.De SantisAhmed, A.A.Ahmed2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/3165Defect free trench isolation for high voltage bipolar application on SOI waferProceedings paper