Determining Si composition in SiGe alloys with <1% Si concentrations using Raman spectroscopy

De Wolf, IngridIngridDe WolfSimons, VeerleVeerleSimonsSrinivasan, AshwynAshwynSrinivasanVerheyen, PeterPeterVerheyenLoo, RogerRogerLoo2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30567Determining Si composition in SiGe alloys with <1% Si concentrations using Raman spectroscopyMeeting abstracthttp://ma.ecsdl.org/content/MA2018-02/31/1070.short