Plasma Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2S and H2 plasma

Groven, BenjaminBenjaminGrovenHeyne, MarkusMarkusHeyneMeersschaut, JohanJohanMeersschautNuytten, ThomasThomasNuyttenBender, HugoHugoBenderRichard, OlivierOlivierRichardConard, ThierryThierryConardVerdonck, PatrickPatrickVerdonckVan Elshocht, SvenSvenVan ElshochtHeyns, MarcMarcHeynsRadu, IulianaIulianaRaduCaymax, MattyMattyCaymaxDelabie, AnneliesAnneliesDelabie2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26669Plasma Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2S and H2 plasmaMeeting abstract