Investigation of sealing efficiency of self-assembled monolayers deposited on porous k=2.0 dielectrics as a function of dielectric surface preparation by plasma

Sun, YitingYitingSunArmini, SilviaSilviaArminiBaklanov, MikhaïlMikhaïlBaklanovDe Feyter, StevenStevenDe Feyter2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23137Investigation of sealing efficiency of self-assembled monolayers deposited on porous k=2.0 dielectrics as a function of dielectric surface preparation by plasmaMeeting abstract