Tyaginov, StanislavStanislavTyaginovO'Sullivan, BarryBarryO'SullivanVaisman Chasin, AdrianAdrianVaisman ChasinRawal, YakshYakshRawalChiarella, ThomasThomasChiarellaToledo de Carvalho Cavalcante, CamilaCamilaToledo de Carvalho CavalcanteKimura, YosukeYosukeKimuraVandemaele, MichielMichielVandemaeleRitzenthaler, RomainRomainRitzenthalerMitard, JeromeJeromeMitardVadakupudhu Palayam, SenthilSenthilVadakupudhu PalayamReifsnider, JasonJasonReifsniderKaczer, BenBenKaczer2023-12-122023-09-152023-12-1220232072-666XWOS:001056875100001https://imec-publications.be/handle/20.500.12860/42546Impact of Nitridation on Bias Temperature Instability and Hard Breakdown Characteristics of SiON MOSFETsJournal article10.3390/mi14081514WOS:001056875100001HOT-CARRIER DEGRADATIONULTRA-THIN OXIDESWEAR-OUTNBTIFLUCTUATIONSSILICONVARIABILITYDIELECTRICSTRANSISTORSGENERATIONMEDLINE:37630050