Experimental characterization of NTD rResist shrinkage

Kuchler, BerndBerndKuchlerMulders, ThomasThomasMuldersTaoka, HironobuHironobuTaokaGao, WeiminWeiminGaoKlostermann, UlrichUlrichKlostermannKamimura, SouSouKamimuraGrozev, GrozdanGrozdanGrozevMasahiro, YoshidomeYoshidomeMasahiroShirakawa, MichihiroMichihiroShirakawaLi, WaikinWaikinLi2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28714Experimental characterization of NTD rResist shrinkageProceedings paper10.1117/12.2256568