Width-dependent sheet resistance of nanometer-wide Si fins as measured with micro four-point probe

Bogdanowicz, JanuszJanuszBogdanowiczFolkersma, StevenStevenFolkersmaSergeant, StefanieStefanieSergeantSchulze, AndreasAndreasSchulzeMoussa, AlainAlainMoussaPetersen, DirchDirchPetersenHansen, OleOleHansenHenrichsen, HenrikHenrikHenrichsenNielsen, PeterPeterNielsenVandervorst, WilfriedWilfriedVandervorst2021-10-252021-10-2520181862-6300https://imec-publications.be/handle/20.500.12860/30280Width-dependent sheet resistance of nanometer-wide Si fins as measured with micro four-point probeJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/pssa.201700857/abstract;jsessionid=4B590B8573913545910A4BBD2F57931E.f01t03