Towards the understanding of intrinsic degradation and breakdown of SiOCH low-k dielectrics

Wu, ChenChenWuLi, YunlongYunlongLiBarbarin, YohanYohanBarbarinCiofi, IvanIvanCiofiTang, BaojunBaojunTangKauerauf, ThomasThomasKaueraufCroes, KristofKristofCroesBoemmels, JuergenJuergenBoemmelsDe Wolf, IngridIngridDe WolfTokei, ZsoltZsoltTokei2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24836Towards the understanding of intrinsic degradation and breakdown of SiOCH low-k dielectricsProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6860611&contentType=Conference+Publications