Loo, RogerRogerLooWang, GangGangWangSouriau, LaurentLaurentSouriauLin, VicVicLinTakeuchi, ShotaroShotaroTakeuchiBrammertz, GuyGuyBrammertzCaymax, MattyMattyCaymax2021-10-182021-10-1820100013-4651https://imec-publications.be/handle/20.500.12860/17529High quality Ge virtual substrates on Si wafers with standard STI patterningJournal article