Photonic Biosensors in Silicon Nitride with an On-Chip Spectral Filter Read Out by a Broadband Light Source

Martens, DaanDaanMartens2021-10-242021-10-242017-06https://imec-publications.be/handle/20.500.12860/28927Photonic Biosensors in Silicon Nitride with an On-Chip Spectral Filter Read Out by a Broadband Light SourcePHD thesis