Okhonin, S.S.OkhoninFazan, P.P.FazanKubicek, StefanStefanKubicekHenson, KirklenKirklenHensonDe Meyer, KristinKristinDe MeyerPonomarev, YouriYouriPonomarev2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5537Impact of channel engineering technology on HC performance of 100 nm MOSFETsProceedings paper