Ab initio treatment of silicon-hydrogen bond rupture at Si/SiO2 interfaces

Jech, MarkusMarkusJechEl-Sayed, Al-MoatasemAl-MoatasemEl-SayedTyaginov, StanislavStanislavTyaginovShluger, Alexander LAlexander LShlugerGrasser, TiborTiborGrasser2021-10-272021-10-2720191098-0121https://imec-publications.be/handle/20.500.12860/33220Ab initio treatment of silicon-hydrogen bond rupture at Si/SiO2 interfacesJournal articlehttps://doi.org/10.1103/PhysRevB.100.195302