Low temperature junctionless device stacking enabled by leading edge

Besnard, GuillaumeGuillaumeBesnardGaudin, GweltazGweltazGaudinSchwarzenbach, WalterWalterSchwarzenbachEcarnot, LudovicLudovicEcarnotRadu, IoniutIoniutRaduNguyen, Bich-YenBich-YenNguyenVandooren, AnneAnneVandoorenCollaert, NadineNadineCollaert2021-10-272021-10-272019-04https://imec-publications.be/handle/20.500.12860/32529Low temperature junctionless device stacking enabled by leading edgeMeeting abstracthttps://ieeexplore.ieee.org/document/8804665