Computational nanometrology of line edge roughness: recent challenges and advances

Constantoudis, VassiliosVassiliosConstantoudisPapavieros, GeorgeGeorgePapavierosLorusso, GianGianLorussoGogolides, EvangelosEvangelosGogolides2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28060Computational nanometrology of line edge roughness: recent challenges and advancesOral presentationhttp://mne2017.org/wp-content/uploads/2017/10/Booklet_MNE_FINAL_WEB.pdf