Use of gettering and defect induced processes in ultra-thin buried oxide synthesis

Litovchenko, V. G.V. G.LitovchenkoEfremov, A. A.A. A.EfremovRomanuk, B. N.B. N.RomanukMel'nik, V. P.V. P.Mel'nikClaeys, CorCorClaeys2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2000Use of gettering and defect induced processes in ultra-thin buried oxide synthesisProceedings paper