Capogreco, ElenaElenaCapogrecoDegraeve, RobinRobinDegraeveLisoni, JuditJuditLisoniLuong, VuVuLuongArreghini, AntonioAntonioArreghiniToledano Luque, MariaMariaToledano LuqueHikavyy, AndriyAndriyHikavyyNumata, ToshinoriToshinoriNumataDe Meyer, KristinKristinDe MeyerVan den Bosch, GeertGeertVan den BoschVan Houdt, JanJanVan Houdt2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25032Integration and electrical evaluation of Epi-Si and Epi-SiGe channels for 3D NAND memory applicationsProceedings paper