Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors

Vereecke, GuyGuyVereeckeDe Coster, HanneHanneDe CosterCarolan, PatrickPatrickCarolanBender, HugoHugoBenderWillems, KherimKherimWillemsRagnarsson, Lars-AkeLars-AkeRagnarssonVan Dorpe, PolPolVan DorpeHoriguchi, NaotoNaotoHoriguchiHolsteyns, FrankFrankHolsteyns2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29825Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistorsProceedings paperhttps://spcc2017.com/wp-content/uploads/2017/03/02-06-Vereecke-imec-Wet_etching_of_TiN_in_FinFET.pdf