Structural and mechanical properties of polycrystalline silicon germanium for micromachining applications

Sedky, SherifSherifSedkyFiorini, PaoloPaoloFioriniCaymax, MattyMattyCaymaxLoreti, S.S.LoretiBaert, KrisKrisBaertHermans, LouLouHermansMertens, RobertRobertMertens2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2941Structural and mechanical properties of polycrystalline silicon germanium for micromachining applicationsJournal article