Dekkers, HaroldHaroldDekkersvan Setten, MichielMichielvan SettenBelmonte, AttilioAttilioBelmonteVaisman Chasin, AdrianAdrianVaisman ChasinSubhechha, SubhaliSubhaliSubhechhaRassoul, NouredineNouredineRassoulGlushkova, AnastasiaAnastasiaGlushkovaDelhougne, RomainRomainDelhougneKar, Gouri SankarGouri SankarKar2022-04-042022-04-012022-04-042022-02-232637-6113https://imec-publications.be/handle/20.500.12860/39564Deposition, Characterization, and Performance of Spinel InGaZnO4Journal article10.1021/acsaelm.1c01315Electrical & electronic engineeringIn−Ga−Zn oxide (IGZO), Ga2ZnO4, spinel, c-axis-aligned crystalline (CAAC), field-effect mobility, bias stress stability.