Margetis, JoeJoeMargetisMosleh, AboozarAboozarMoslehGhetmiri, Seyed AmirSeyed AmirGhetmiriAl-Kabi, SattarSattarAl-KabiDou, WeiWeiDouDu, WeiWeiDuBhargava, NupurNupurBhargavaYu, Shui-QingShui-QingYuProfijt, HaraldHaraldProfijtKohen, DavidDavidKohenLoo, RogerRogerLooVohra, AnuragAnuragVohraTolle, JohnJohnTolle2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28916Fundamentals of Ge1-xSnx and SiyGe1-x-ySnx RPCVD epitaxyJournal articlehttp://www.sciencedirect.com/science/article/pii/S1369800116306734