Xie, RongsieRongsieXieZhang, CanCanZhangvan der Veen, MarleenMarleenvan der VeenArstila, KaiKaiArstilaHantschel, ThomasThomasHantschelChen, BinganBinganChenZhong, GuofangGuofangZhongRobertson, JohnJohnRobertson2021-10-212021-10-2120130957-4484https://imec-publications.be/handle/20.500.12860/23407Carbon nanotube growth for through-silicon via applicationsJournal article