Ultra-sensitive and compact on-chip gas sensor on a silicon nitride photonic integrated circuit

Antonacci, GiuseppeGiuseppeAntonacciGoyvaerts, JeroenJeroenGoyvaertsZhao, HaolanHaolanZhaoBaumgartner, BettinaBettinaBaumgartnerLendl, BernhardBernhardLendlBaets, RoelRoelBaets2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/34637Ultra-sensitive and compact on-chip gas sensor on a silicon nitride photonic integrated circuitProceedings paperhttps://doi.org/10.1117/12.2557047