Process-improved RRAM cell performance and reliability and paving the way for manufacturability and scalability for high density memory application

Kar, Gouri SankarGouri SankarKarFantini, AndreaAndreaFantiniChen, YangyinYangyinChenParaschiv, VasileVasileParaschivGovoreanu, BogdanBogdanGovoreanuHody, HubertHubertHodyJossart, NicoNicoJossartTielens, HildeHildeTielensBrus, StephanStephanBrusRichard, OlivierOlivierRichardVandeweyer, TomTomVandeweyerWouters, DirkDirkWoutersAltimime, LaithLaithAltimimeJurczak, GosiaGosiaJurczak2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20906Process-improved RRAM cell performance and reliability and paving the way for manufacturability and scalability for high density memory applicationProceedings paper