Schmidt, HaraldHaraldSchmidtTeerlinck, IvoIvoTeerlinckMeuris, MarcMarcMeurisMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/854In situ and real time characterization of wet chemical silicon surface processes by electrochemical open circuit potential measurementsProceedings paper