Clarysse, TrudoTrudoClarysseKonttinen, MikkoMikkoKonttinenParmentier, BrigitteBrigitteParmentierMoussa, AlainAlainMoussaVandervorst, WilfriedWilfriedVandervorstImpellizzeri, GiulianaGiulianaImpellizzeriNapolitani, EnricoEnricoNapolitaniPrivitera, VittorioVittorioPriviteraNielsen, Peter F.Peter F.NielsenPetersen, Dirch H.Dirch H.PetersenHansen, OleOleHansen2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20478Advanced characterization of carrier profiles in germanium using micro-machined contact probesProceedings paper