Tavares, J.J.TavaresBender, HugoHugoBenderLarsen, Kim KyllesbechKim KyllesbechLarsenLauwers, AnneAnneLauwersMaex, KarenKarenMaexVan Rossum, MarcMarcVan Rossum2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/376Structural characterization of buried epitaxial b-FeSi2 layers in (111) siliconProceedings paper