DTCO of Nanosheet and Forksheet Architectures: Exploring Dielectric Walls, Contacting Schemes, and Active Regions for Optimized RO Performance

Gaddemane, GautamGautamGaddemaneSchuddinck, PieterPieterSchuddinckBhuwalka, KrishnaKrishnaBhuwalkaRzepa, GerhardGerhardRzepaMirabelli, GioeleGioeleMirabelliMatagne, PhilippePhilippeMatagneYakimets, DmitryDmitryYakimetsWu, HaoHaoWuHellings, GeertGeertHellingsLiu, ChangzeChangzeLiu2025-05-132024-09-142025-05-132024979-8-3503-8308-9N/AWOS:001223367200075https://imec-publications.be/handle/20.500.12860/44483DTCO of Nanosheet and Forksheet Architectures: Exploring Dielectric Walls, Contacting Schemes, and Active Regions for Optimized RO PerformanceProceedings paper10.1109/EDTM58488.2024.10511609979-8-3503-7152-9WOS:001223367200075