Spatial characterization of the local charge-distribution in silicon-rich-oxide channel-hot-electron injection based non-volatile memory cells using the charge pumping technique

Rosmeulen, MaartenMaartenRosmeulenCrupi, IsodianaIsodianaCrupiVan Houdt, JanJanVan HoudtDe Meyer, KristinKristinDe Meyer2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8088Spatial characterization of the local charge-distribution in silicon-rich-oxide channel-hot-electron injection based non-volatile memory cells using the charge pumping techniqueProceedings paper