Transmission electron microscopy investigation of the crystallographic quality of silicon films grown epitaxially on porous silicon

Jin, S.S.JinBender, HugoHugoBenderStalmans, LievenLievenStalmansBilyalov, RenatRenatBilyalovPoortmans, JefJefPoortmansLoo, RogerRogerLooCaymax, MattyMattyCaymax2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4456Transmission electron microscopy investigation of the crystallographic quality of silicon films grown epitaxially on porous siliconJournal article