Scaling CMOS beyond Si FinFET: an analog/RF perspective

Parvais, BertrandBertrandParvaisHellings, GeertGeertHellingsSimicic, MarkoMarkoSimicicWeckx, PieterPieterWeckxMitard, JeromeJeromeMitardJang, DoyoungDoyoungJangDeshpande, Veeresh VidyadharVeeresh VidyadharDeshpandevan Liempd, BarendBarendvan LiempdVeloso, AnabelaAnabelaVelosoVandooren, AnneAnneVandoorenWaldron, NiamhNiamhWaldronWambacq, PietPietWambacqCollaert, NadineNadineCollaertVerkest, DiederikDiederikVerkest2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31493Scaling CMOS beyond Si FinFET: an analog/RF perspectiveProceedings paperhttps://ieeexplore.ieee.org/document/8486857