Electrical quality assessment of epitaxial wafers based on p-n junction diagnostics

Claeys, C.C.ClaeysSimoen, EddyEddySimoenPoyai, AmpornAmpornPoyaiCzerwinski, A.A.Czerwinski2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3295Electrical quality assessment of epitaxial wafers based on p-n junction diagnosticsJournal article