The imec iN7 EUV platform: M2-Block and Via patterning developments

Bekaert, JoostJoostBekaertFranke, Joern-HolgerJoern-HolgerFrankeMao, MingMingMaoLariviere, StephaneStephaneLariviereDecoster, StefanStefanDecosterDi Lorenzo, PaoloPaoloDi LorenzoKutrzeba Kotowska, BogumilaBogumilaKutrzeba KotowskaBlanco, VictorVictorBlancoHendrickx, EricEricHendrickxGallagher, EmilyEmilyGallagherLeray, PhilippePhilippeLerayKim, Ryan Ryoung hanRyan Ryoung hanKimMcIntyre, GregGregMcIntyreColsters, PaulPaulColstersWittebrood, FrisoFrisoWittebroodvan Dijk, JoepJoepvan DijkTimoshkov, VadimVadimTimoshkovKiers, TonTonKiersMaslow, MarkMarkMaslow2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26330The imec iN7 EUV platform: M2-Block and Via patterning developmentsProceedings paperhttp://euvl2016.org/pdf/EUVL2016_Oral_and_Poster.pdf?161007