Brunco, DavidDavidBruncoOpsomer, KarlKarlOpsomerDe Jaeger, BriceBriceDe JaegerWinderickx, GillisGillisWinderickxVerheyden, KurtKurtVerheydenMeuris, MarcMarcMeuris2021-10-172021-10-1720081099-0062https://imec-publications.be/handle/20.500.12860/13460Observation and suppression of nickel germanide overgrowth on germanium substrates with patterned SiO2 structuresJournal article