A novel approach to characterization of a low-k dielectric polymer surface

Martin Hoyas, AnaAnaMartin HoyasSchuhmacher, JorgJorgSchuhmacherWhelan, CarolineCarolineWhelanBaklanov, MikhaïlMikhaïlBaklanovCarbonell, LaureLaureCarbonellSchaekers, MarcMarcSchaekersCelis, Jean-PierreJean-PierreCelisMaex, KarenKarenMaex2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6586A novel approach to characterization of a low-k dielectric polymer surfaceOral presentation