Ciofi, IvanIvanCiofiRoussel, PhilippePhilippeRousselBaert, RogierRogierBaertContino, AntoninoAntoninoContinoGupta, AnshulAnshulGuptaCroes, KristofKristofCroesWilson, ChrisChrisWilsonMocuta, DanDanMocutaTokei, ZsoltZsoltTokei2021-10-272021-10-2720190018-9383https://imec-publications.be/handle/20.500.12860/32714RC benefits of advanced metallization optionsJournal articlehttps://ieeexplore.ieee.org/document/8680758