(A)thermal migration of Ge during junction formation in s-Si grown on thin SiGe-buffer layers

Vandervorst, WilfriedWilfriedVandervorstPawlak, BartekBartekPawlakJanssens, TomTomJanssensBrijs, BertBertBrijsDelhougne, RomainRomainDelhougneCaymax, MattyMattyCaymaxLoo, RogerRogerLoo2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9825(A)thermal migration of Ge during junction formation in s-Si grown on thin SiGe-buffer layersOral presentation