A simple and efficient RF technique for the TSV characterization

Sun, XiaoXiaoSunRoda Neve, CesarCesarRoda NeveVan Huylenbroeck, StefaanStefaanVan HuylenbroeckVan der Plas, GeertGeertVan der PlasBeyne, EricEricBeyne2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29524A simple and efficient RF technique for the TSV characterizationProceedings paperhttp://ieeexplore.ieee.org/document/7999868/