Soussan, PhilippePhilippeSoussanO'Donnell, KathyKathyO'DonnellD'Haen, JanJanD'HaenVanhoyland, GeertGeertVanhoylandBeyne, EricEricBeyneTilmans, HarrieHarrieTilmans2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11258Pulsed DC sputtered aluminum nitride: a novel approach to control stress and C-axis orientationProceedings paper