EUV single patterning validation of curvilinear routing

Treska, FergoFergoTreskaXu, DongboDongboXuGillijns, WernerWernerGillijnsSherazi, YasserYasserSherazi2025-02-122023-11-292025-02-122023-04-280277-786Xhttps://imec-publications.be/handle/20.500.12860/43200EUV single patterning validation of curvilinear routingProceedings paper10.1117/12.2654633Multidisciplinary sciencesEUVSingle PatterningCurvilinearILTMBMWVLSI design