Influence of methane concentration on the electrical transport properties in heavily boron-doped nanocrystalline CVD diamond films

Janssens, Stoffel D.Stoffel D.JanssensRezacova, VladkaVladkaRezacovaNesladek, MilosMilosNesladekHaenen, KenKenHaenenWagner, PatrickPatrickWagner2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17320Influence of methane concentration on the electrical transport properties in heavily boron-doped nanocrystalline CVD diamond filmsMeeting abstract