PIXE as a complementary technique to RBS in thin film characterization

Meersschaut, JohanJohanMeersschautKayhko, MarkoMarkoKayhkoLenka, HaraHaraLenkaZhao, QiangQiangZhaoVantomme, AndreAndreVantommeVandervorst, WilfriedWilfriedVandervorst2021-10-202021-10-202012-03https://imec-publications.be/handle/20.500.12860/21128PIXE as a complementary technique to RBS in thin film characterizationMeeting abstract