Progress towards passivation of Ge/high-k interfaces

Houssa, MichelMichelHoussaPourtois, GeoffreyGeoffreyPourtoisMitard, JeromeJeromeMitardDelabie, AnneliesAnneliesDelabieBellenger, FlorenceFlorenceBellengerMeuris, MarcMarcMeurisCaymax, MattyMattyCaymaxHeyns, MarcMarcHeynsAfanasiev, ValeriValeriAfanasievStesmans, AndreAndreStesmans2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15493Progress towards passivation of Ge/high-k interfacesMeeting abstract