(Non-hemispherical) apex shape formation and (non-uniform) apex temperature distribution during laser-assisted atomprobe tomography of semiconductors

Bogdanowicz, JanuszJanuszBogdanowiczKumar, ArulArulKumarMelkonyan, DavitDavitMelkonyanArnoldi, LaurentLaurentArnoldiFleischmann, ClaudiaClaudiaFleischmannMorris, RichardRichardMorrisVella, AngelaAngelaVellaGilbert, MatthieuMatthieuGilbertJonathan, HouardHouardJonathanVandervorst, WilfriedWilfriedVandervorst2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26362(Non-hemispherical) apex shape formation and (non-uniform) apex temperature distribution during laser-assisted atomprobe tomography of semiconductorsProceedings paper