Congedo, GabrieleGabrieleCongedoToledano Luque, MariaMariaToledano LuqueArreghini, AntonioAntonioArreghiniKar, Gouri SankarGouri SankarKarTang, BaojunBaojunTangDegraeve, RobinRobinDegraeveVan Aerde, StevenStevenVan AerdeKim, WoosikWoosikKimVan den Bosch, GeertGeertVan den BoschVan Houdt, JanJanVan Houdt2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22167Vertical polysilicon pinch-off FET for 3D memory technology: feasibility and electrical performanceProceedings paper